Biophotonics & Microsystems Laboratory
Room-Temperature SWCNs Integrated on CMOS using a Maskless Post-CMOS MEMS Process and Localized Heating
Students: Ying Zhou, University
of Florida (yzhou[at]ufl.edu)
Advisor: Huikai Xie, University of Florida (hkx[at]ufl.edu)
Sponsor(s): Nanoholdings
Objectives
• Integrate room-temperature SWNTs on CMOS substrate using localized heating and a maskless post-CMOS MEMS process
Technical Approach
• Use polysilicon as an integrated micro-heater
• Use a maskless MEMS fabrication process to create microstructures with proper thermal isolation
• Use localized heating to reach over 800°C at selected regions in a
room-temperature CVD chamber
Accomplishment
• Designed and fabricated Pt micro-heaters
• Temperature characterization
• Single-
and Multi-walled Carbon Nanotubes locally grown on these micro-heaters
Applications:
•
Precise positioned and repeatable high quality CNTs growth
•
High-sensitivity chemical and biological sensors
•
Various low-cost, multifunctional integrated nanosystems
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416
