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Design and Modeling of Electrothermal
Micromirrors
Students:
Sagnik Pal
Sponsor(s): NSF, Lantis Laser Inc.
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Objectives
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Understanding device behavior, improving performance,
reliability and repeatability
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Compact models for efficient and accurate simulations
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Exploring possible applications
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Accomplishments
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Technical Approach
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Applications:
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Linear scanning in sample
arm of dental OCT.
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Lateral scanning for FTIR, reference arm of OCT etc.
- Robust and efficient micromirror design
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Publications
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• S.
Pal, K. Jia, and H. Xie, “An Electrothermal Micromirror with
High Linear Scanning Efficiency,” LEOS 2007, 21-25 October,
2007, ThAA4, Lake Buena Vista, Florida.
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•S.
Pal, K. Jia, S. Maley, and H. Xie, “Reduced order thermal
modeling of a one-dimensional electrothermally actuated
micromirror device,” to be presented at the SPIE Photonics
West Conference, San Jose, CA, 19-24 January, 2008.
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Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416 |
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