Biophotonics &
Microsystems Laboratory
Self-aligned deep
trench process for light weight MEMS mirrrors
Students:
Lei Wu
Sponsor(s): NSF, Florida Photonics Center of Excellence
Objectives
• Develop a novel self-aligned deep trench process enabling the fabrication of large aperture size electrothermal MEMS mirrors with light weight mirror plate and wider actuation bimorph beams.
Technical Approach
• Novel process featuring self-aligned patterning in deep trench of Si Wafer
• Si DRIE based bulk micromachining
Accomplishment
• Demonstrated the fabrication of a trial version light weight mirror with 3mm aperture size
Applications:
• Agile scanning mirror of large aperture size by significantly reduced mirror mass and stiffer actuation beams.
• Improving temperature uniformity by the wider bimorph beams
• Increasing the convection on the mirror surface for faster thermal response
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416
