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Biophotonics & Microsystems Laboratory

Lateral-shift-free MEMS micromirror/lens scanner
Students: Lei Wu

Sponsor(s): NSF, Florida Photonics Center of Excellence

Objectives

• Develop MEMS micromirror/lens scanner which can perform purely vertical scanning and center-fixed 2D scanning

Technical Approach

• Unique electrothermal actuator design for lateral-shift-free large-vertical-displacement actuation

• Surface and bulk-combined micromachining batch process

Accomplishment

• Demonstrated large vertical displacement (>0.7mm) at low driving voltage (<8V) on a 2mm footprint device with negligible lateral shift (<10um) and tilting(<0.7º)

• Demonstrated center-fixed 2D scanning micromirror with large optical angles (~±50º) at low driving voltage (<10V)

Applications:

• Biomedical (OCT, 2-photon and confocal) endoscopic imaging

• Micro FTIR

• Optical phased array

Video clips

Publications

• L. Wu and H. Xie, Sensors and Actuators A, in press.

• L. Wu, etc., Digest Tech. pp.754-757, IEEE MEMS 2008, Tucson, AZ, Jan. 2008.

• L. Wu and H. Xie, IEEE Optical MEMS 2007, Hualien, Taiwan, Aug. 2007.

• L. Wu and H. Xie, Digest Tech. pp.1075-1078, Transducers’ 07, Lyon, France, Jun. 2007.