Biophotonics & Microsystems Laboratory
Full
circumferential scanning probe based on a dual reflective MEMS mirror
Students: Lei Wu
Sponsor(s): NSF, Florida Photonics Center of Excellence
Objectives
• Develop a dual reflective MEMS micromirror that can perform large scanning angle (>90º)
• Integration of MEMS mirror into miniaturized endoscopic imaging probe for full circumferential scanning
Technical Approach
• Unique electrothermal actuator with Pt heater for large actuation
• Unique surface and bulk-combined micromachining batch process for dual reflective coating
Accomplishment
• Demonstrated a dual reflective mirror that can perform over 90º rotational angle at DC voltage <5V
• Demonstrated full circumferential scanning pattern from both the mirror surfaces
Applications:
• Biomedical endoscopic imaging for internal organs
Publications
• L. Wu and H. Xie, Photonics West 2008, San Jose, Jan. 2008.
• L. Wu and H. Xie, IEEE Journal of Selected Topics in Quantum Electronics, Volume 13, Issue 2, pp: 316 - 321, Apr. 2007.
• L. Wu and H. Xie, IEEE Optical MEMS 2006, Big Sky, MT, Aug. 2006.
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416
