Objectives

• Design MEMS micromirror based on smart positioning of electrothermal bimorph actuators to realize tip-tilt- piston scan capability with large scan range and low driving voltage

• Realize piston motion with no lateral shift and rotation motion with fixed rotation axis

• Integrate TTP micromirror into miniaturized probe for endoscopic imaging applications, e.g. OCT

• Design high fill-factor micromirror array based on the TTP micromirror for phase array applications

Accomplishment

• Three generations of TTP micromirror based on ISC actuators demonstrated

•  Out-of-plane piston stroke of 470um

•  In-plane non-resonance 2D optical scan angle of +/- 30 degree

•  Resonance scan range over 100 degree

Applications

• Endoscopic medical imaging

• High fill-factor mirror array for potential phase array application

• Potential FTIR application if high precision piston motion is achieved

Technical Approach

•  Surface and bulk micromachining

•  Inverted-Series-Connected (ISC) bimorph actuators with sandwiched overlap connection

•  Embedded Platinum heater for uniform heating

•  Silicon based mirror plate

Publications

•         Optics in the Southeast 2006, Session 2: Optical Imaging and Sensing, pp 75, Sept 6-8, 2006

•         CLEO/QELS 2007, Nanophotonic Structures and Devices, paper CThJJ1, May 6-11, 2007

•         Hilton Head 2008, June 1-5, 2008, Accepted