1-D Bimorph Actuated Micromirror for OCT Application

Students: Kemiao Jia, Hugang Ren (SUNY)

Advisor: Huikai Xie ; Yingtian Pan (SUNY)

Objectives

• Design MEMS micromirror based on bimorph actuation for 1-Dimensional scan

• Integrated 1-D micromirror into miniaturized probe for OCT applications

Accomplishment

• Tens of micromirrors fabricated and integrated with base mount

• Up to 60 degrees of non-resonant optical scan range achieved

• Resonant scan range over 120 degrees

Technical Approach

• CMOS-MEMS process for early devices

• UF-based surface and bulk micro-machining combined for current devices

• Embedded Cr-Pt-Cr heater to replace poly-silicon heater

• Single crystal silicon based mirror plate

Applications

• Endoscopic medical imaging for early bladder cancer diagnosis

• Visualization of re-epithelization with OCT for burnt skin

• OCT imaging of bladder muscle contractility for urinary incontinence

Publications

•         IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2008