First resonant mode of a large vertical displacement (LVD) mirror

Second Resonant mode of LVD Mirror

Purely Vertical Resonant Mode

Lateral Shift Free Mirror Device

Scanning Pattern Generated by a Micromirror Device

Circular scanning of LSF mirror

Lissajous scan pattern of LSF mirror

An LSF mirror scanning vertically

Simulated Working Mode of Lateral Gyroscope

Simulated Working Mode of Lateral Gyroscope

Simulated Working Mode of 3-axis Accelerometer

Simulated Working Mode of 3-axis Accelerometer

Simulated Working Mode of 3-axis Accelerometer

Purely Vertical Resonant Mode of LVD

Purely Rotational Resonant Mode of LVD

Purely Rotational Resonant Mode of LVD