Biophotonics & Microsystems Laboratory

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List of Publications

 

 

Book Chapters  (List of  Publications)

  • H. Xie, A. Jain, S. Todd, “Single-crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications,” a chapter in MEMS/NEMS HANDBOOK: TECHNIQUES AND APPLICATIONS, edited by C. Leondes, Springer, 2006.

  • H. Xie, G.K. Fedder and Bob Sulouff, “Physical Sensors: Accelerometers,” in COMPREHENSIVE MICROSYSTEMS: FUNDAMENTALS,TECHNOLOGY AND APPLICATIONS, Edited by Y. Gianchandani, O. Tabata, and Hans Zappe, Elsevier, 2007.

Refereed Journal papers (Reverse chronicle order since 2002)  (List of  Publications)

1) L. Wu, and H. Xie, “A large vertical displacement electrothermal bimorph microactuator with very small lateral shift,” Sensors & Actuators A, in print.
2) S. Todd, and H. Xie, “An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator,” Journal of Microelectromechanical Systems, vol.17, issue 1, Feb. 2008, pp213-225.
3) H. Qu and H. Xie, “Process Development for CMOS-MEMS Sensors with Robust, Electrically- Isolated Bulk Silicon Microstructures,” Journal of Microelectromechanical Systems, vol.16, no. 5, pp. 1152-1161 (October 2007).
4) Ling Fu, Ankur Jain, Charles Cranfield, Huikai Xie, and Min Gu, “Three-dimensional nonlinear optical endoscopy,” J. Biomed. Opt. Vol. 12, 040501 (July 2007).
5) Z. Wang, C. Lee, W.C. Waltzer, J. Liu, H. Xie, Z. Yuan, and Y. Pan, “in vivo bladder imaging with MEMS-based endoscopic Spectral Domain Optical Coherence Tomography,” Journal of Biomedical Optics, Vol. 12, 034009 (June 2007).
6) A. Jain and H. Xie, “Microendoscopic Confocal imaging probe based on a LVD microlens scanner,” IEEE Journal of Selected Topics in Quantum Electronics, Vol.13 (2007), No. 2, pp. 228-234.
7) L. Wu and H. Xie, “A 124° rotation angle electrothermal micromirror with integrated platinum heater,” IEEE Journal of Selected Topics in Quantum Electronics, Vol.13 (2007), No. 2, pp. 316-321.
8) A. Jain, and H. Xie, "A Single-Crystal-Silicon Micromirror for Large Bi-directional 2-D Scanning Applications," Sensors and Actuators A, vol. 130-131 (2006), pp. 454-460.
9) S.T. Todd, A. Jain, H. Qu and H. Xie, “A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators,” Journal of Optics A, Vol. 8, pp. 352-359, June 2006.
10)  L. Fu, A. Jain, H. Xie, C. Cranfielda, and M. Gu, “Nonlinear optical endoscopy based on a double-clad photonic crystal fiber and a MEMS mirror,” Optics Express, Vol. 14, pp. 1027-1032, February 2006.
11) S.T. Todd, and H. Xie, "Steady-state 1D electrothermal modeling of an electrothermal transducer," Journal of Micromechanics and Microengineering, Vol. 15, Iss. 12, pp. 2264-2276, December 2005.
12) A. Sadat, H. Qu, C. Yu, J. Yuan, H. Xie, “Low Power CMOS Wireless MEMS Motion Sensor for Physi-ological Activity Monitoring,” IEEE Transactions on Circuits and Systems I, Vol. 52 (2005), pp.2539-51.
13) A. Jain, and H. Xie, "An Electrothermal Microlens Scanner with Low-Voltage, Large-Vertical-Displacement Actuation," IEEE Photonics Technology Letters, Vol. 17, No. 9, pp. 1971-1973, Sept. 2005.
14) A. Jain, H. Qu, S. Todd, and H. Xie, “A Thermal Bimorph Micromirror with Large Bi-directional and Vertical Actuation,” Sensors & Actuators A, Vol. 122, pp. 9-15, July 2005.
15) A. Jain, A. Kopa, Y. Pan, G.K. Fedder, H. Xie, “A Two-Axis Electrothermal Micromirror for Endoscopic OCT,” IEEE Journal of Selected Topics in Quantum Electronics, Vol.10 (2004), pp. 636-642.
16) H. Xie, Y. Pan and G.K. Fedder, “A SCS micromirror for optical coherence tomographic imaging”, Sensors & Actuators: A, Vol. 103 (2003), pp. 237 – 241.
17) H. Xie and G.K. Fedder, “Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope,” IEEE Sensors Journal, Vol.3, Iss.5, Oct. 2003, p. 622- 631.
18)  H. Xie and G.K. Fedder, “Integrated MEMS Gyroscopes,” (invited), Journal of Aerospace Engineering, Vol. 16 (2003), No. 2, pp. 65-75.
19) T. Xie, H. Xie, G.K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with a Modified MEMS Mirror for Detection of Bladder Cancers", Applied Optics, Vol. 42, No. 31 (2003), pp.6422-6426.
20) T. Xie, H. Xie, G.K. Fedder, Y. Pan, “Endoscopic optical coherence tomography with a new MEMS mirror,” Electronics Letters, 39, 1535-1536 (2003).
21) H. Xie, Y. Pan and G. K. Fedder, "A CMOS-MEMS Micromirror with Curled Comb Drives," Journal of Microelectromechanical Systems, vol.12, no.4 (2003), pp. 450-457.
22) H. Xie, G. Fedder, Y. Pan and W. Frey, “Phase and Vibration Analysis for a CMOS-MEMS Gyroscope,” International Journal of Nonlinear Sciences and Numerical Simulation, pp. 319-324, vol.3, no. 3-4, 2002.
23) H. Xie and G.K. Fedder, “Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS,” Sensors & Actuators: A, Vol. 95 (2002), pp. 212-221.
24) H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, "Post-CMOS Processing for HAR Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, Vol. 11 (2002), pp.93-101.
25) Y. Pan, H. Xie and G.K. Fedder, “Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror”, Optics Letters, Vol. 26, no. 24 (Dec. 15, 2001), pp. 1966-1968.

  

 

Conference papers (reverse chronicle order since 2002)   (List of  Publications)

 K. Jia and H. Xie, "An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage", Accepted for Hilton Head, June 2008.
L. Wu, S. Maley, T. Nelson, P. McManamon, and H. Xie, “A Large-Aperture, Piston-Tip-Tilt Micromirror for Optical Phase Array Applications,” to be presented at IEEE MEMS’08, Tucson, Arizona, USA, 13-17 January, 2008.
H. Qu, D. Fang, and H. Xie, H. Qu, H Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", to be presented at the IEEE NEMS 2008, Sanya, China, 6-9 January 2008.
H. Sun, F. Maarouf, K. Jia, H. Xie, "An Improved Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers", to be presented at the IEEE NEMS 2008, Sanya, China, 6-9 January 2008.
L. Wu and H. Xie, “A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging,” to be presented at the SPIE Photonics West Conference, San Jose, CA, 19-24 January, 2008.
S. Pal, K. Jia, S. Maley, and H. Xie, “Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device,” to be presented at the SPIE Photonics West Conference, San Jose, CA, 19-24 January, 2008.
L. Wu, L. Fu, M. Gu, and H. Xie, “An Endoscopic Nonlinear Optical Imaging Probe Based on 2-D Micromirror,” LEOS 2007, 21-25 October, 2007, ThAA1, Lake Buena Vista, Florida.
S. Pal, K. Jia, and H. Xie, “An Electrothermal Micromirror with High Linear Scanning Efficiency,” LEOS 2007, 21-25 October, 2007, ThAA4, Lake Buena Vista, Florida.
L. Wu and H. Xie, “A Lateral-shift-free LVD Microlens Scanner for Confocal Microscopy,” Proc. of the 2007 IEEE International Conference on Optical MEMS and Nanophotonics, 12-16 August, 2007, Hualien, Taiwan.
H. Xie, “MEMS-based endoscopic optical coherence tomography,” (invited) Proc. of the 3rd Asian and Pacific Rim Symposium on Biophotonics, Cairns, Australia, July 9-11, 2007.
M. Wang, K. D.T. Ngo, I. Batarseh, and H. Xie, “Design and Fabrication of Integrated Power Inductor Based on Silicon Molding Technology”, Proc. of the 38th Annual IEEE Power Electronics Specialists Conference (PESC'07), Orlando, Florida, June 17-21, 2007.
L. Wu and H. Xie, “A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens,” Proc. of IEEE Transducers’07, June 10-14, 2007, Lyon, France.
K. Jia and H. Xie, “Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage,” IEEE CLEO/QELS 2007, May 6-11, 2007, Baltimore, Maryland, US.
H. Qu, D. Fang, and H. Xie, “Fabrication and Characterization of an Integrated CMOS-MEMS Accelerometer,” Nanotech 2007, Santa Clara, California, US, May 20-24, 2007.
X. Feng, A. Jain, S. Pal, T. Nishida, H. Xie, “LVD micromirror for rapid reference scanning in optical coherence tomography,” Proceedings of the SPIE Photonics West 2007, Jan. 20-25, 2007, San Jose, CA.
K. Lee, L. Wu, H. Xie, J.P. Rolland, “A 3mm catheter for constant depth-resolution probing in Fourier domain optical coherence endoscopy,” Proceedings of the SPIE Photonics West 2007, Jan. 20-25, 2007, San Jose, CA.
L. Wu and H. Xie, “A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater,” Proceedings of the 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 2006, pp. 107-108.
A. Jain and H. Xie, “Endoscopic Microprobe with a LVD Microlens Scanner for Confocal Imaging,” Proceedings of the 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 2006, pp. 168-169.
Z. G. Wang, C. Lee, W. Waltzer, Z. J. Yuan, A. Jain, H. K. Xie, Y. T. Pan, “Optical Coherence Tomography For Noninvasive Diagnosis Of Epithelial Cancers,” Proceedings of the 28th Annual Int’l Conference of the IEEE Engineering in Med & Bio Society, New York City, NY, 2006, pp. 129-132.
Lee, K.S., L. Wu, C. Koehler, E.G. Johnson, E.V. Teuma, O. Ilegbusi, M. Costa, H. Xie, J.P. Rolland, “2mm Catheter Design for Endoscopic Optical Coherence Tomography", the International Optical Design Conference (IODC), Proceedings of SPIE, Vol. 6342, 2006, pp. 63420F1-F9.
D. Fang and H. Xie, “A Low-Noise Low-Power Preamplifier for Capacitive CMOS-MEMS Gyroscopes,” Proceedings of the 49th IEEE International Midwest Symposium on Circuits and System (MWSCAS 2006), San Juan, Puerto Rico, USA, 2006, pp. 135-139.
D. Fang, H. Qu, and H. Xie, “A 1mW Dual-Chopper Amplifier for a 50-µg/√Hz Monolithic CMOS-MEMS Capacitive Accelerometer,” Proceedings of the 2006 Symposium on VLSI Circuits, Honolulu, Hawaii, 2006, pp. 76-77.
A. Jain and H. Xie, “Half-Millimeter-Range Vertically Scanning Microlenses For Microscopic Focusing Applications,” Technical Digest of the 12th Hilton Head Workshop on Solid-state Sensors, Actuators, and Microsystems, Hilton Head Island, SC, 2006, pp. 74-77.
H. Qu, D. Fang, and H. Xie, “A Monolithic CMOS-MEMS 3-Axis Accelerometer With A Low-Power, Low-Noise Dual-Chopper Amplifier,” Technical Digest of the 12th Hilton Head Workshop on Solid-state Sensors, Actuators, and Microsystems, Hilton Head Island, SC, 2006, pp. 224-227.
M. Wang, K. Ngo, I. Batarseh, H. Xie, “Integrated Power Inductor with Silicon Substrate Molding,” Proceedings of the 2006 Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT’06), Singapore, 2006, pp. 290-293.
L. Fu, A. Jain, H. Xie, C. Cranfield, Min Gu, “Integration of a Double-Clad Photonic Crystal Fiber, a GRIN Lens and a MEMS Mirror for Nonlinear Optical Microscopy,” Proceedings of the OSA Biomedical Optics Meeting, Ft. Lauderdale, Florida, 2006, pp.259-261.
Z. Wang, H. Adler, D. Chan, A. Jain*, H. Xie, Z. Wu, and Y. Pan, “Cystoscopic Optical Coherence Tomography for Urinary Bladder Imaging in vivo,” SPIE Photonics West 2006, Proceedings of SPIE, San Jose, CA, 2006, Vol. 6079, pp. 91-99.
C. Lu, H. Qu, H. Xie, D. Young, “CMOS MEMS Accelerometer for Long-Term In Vivo Real-Time Small Animal Biological Monitoring,” Proc. of the IEEE Sensors Conference, Irvine, CA, 2005, pp. 1377-80.
Y. Pan, Z. Wang , Q. Wu ,A. Jain, and H. Xie, “Diagnosis of biological tissue morphology and function with endoscopic optical coherence tomography,” Proceedings of the 27th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Shanghai, China, 2005, pp. 7217-7220.
S. Todd, A. Jain, H. Qu, and H. Xie, “A 3-D Micromirror Utilizing Inverted-Series-Connected Electrothermal Bimorph Actuators for Piston and Tilt Motion,” Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Their Applications, Oulu, Finland, 2005, pp. 27-28.
H. Xie, “MEMS-Based Optical Coherence Imaging,” Proceedings of the International Conference on Quantum Electronics 2005 and the Pacific Rim Conference on Lasers and Electro-Optics 2005, Tokyo, Japan, 2005, pp. 187-188.
D. Fang, and H. Xie, “A Low Noise Capacitive Sensing Amplifier For Cmos-Mems Gyroscope With 1 Mili-Watt Power Dissipation”, Proceedings of the Second International Workshop on Networked Sensing Systems, San Diego, California, 2005, pp. 119-123.
A. Jain, and H. Xie, “An Electrothermal SCS Micromirror for Large Bi-Directional 2-D Scanning,” Digest of Technical Papers of the 2005 International Conference on Solid State Sensors, Actuators and Microsystems (Transducers’05), Seoul, Korea, 2005, pp. 988-991.
H. Xie, G. K. Fedder and Y. Pan, “MEMS-based Optical Coherence Tomography,” Proceedings of at the SPIE Photonics West: MOEMS-MEMS 2005, San Jose, CA, 2005, Vol. 5721, pp. 33-39.
A. Jain, and H. Xie, “A Tunable Microlens Scanner With Large-Vertical-Displacement Actuation,” Proceedings of the 18th IEEE International Conference on MicroElectro Mechanical Systems (MEMS’05), Miami Beach, FL, 2005, pp. 92-95.
A. Jain, S. Todd, and H. Xie, “An Electrothermally-Actuated, Dual-Mode Micromirror for Large Bi-Directional Scanning,” Proceedings of the 2004 IEEE International Electron Devices Meeting (IEDM’04), San Francisco, CA, 2004, pp. 47-50.
M. He, M. Frank, and H. Xie, “CMOS-MEMS Resonator as a Signal Generator for Fully-Adiabatic Logic Circuits,” Proceedings of the SPIE International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, Sydney, Australia, 2004, pp. 235-260.
S. Todd and H. Xie, “An Analytical Electrothermal Model of a 1-D Electrothermal MEMS Micromirror,” Proceedings of the SPIE International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, Sydney, Australia, 2004, pp. 332-335.
D. Fang, and H. Xie, “A Low-Power Low-Noise Capacitive Sensing Amplifier for Integrated CMOS-MEMS Inertial Sensors,” Proceeding of the IASTED International Conference on Circuits, Signals, and Systems (CSS’04), Clearwater Beach, Florida, 2004, pp. 178-183.
H. Qu, D. Fang, and H. Xie, “Single-Crystal Silicon Based 3-axis CMOS-MEMS Integrated Accelerometer,” Proceedings of the Third IEEE International Conference on Sensors (IEEE Sensors 2004), Vienna, Austria, 2004, pp. 661-664.
 A. Jain, H. Qu, S. Todd, G. K. Fedder, and H. Xie, “Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation,” Digest of Technical Papers of the 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 2004, pp. 228-231.
H. Qu, D. Fang, A. Sadat, J. Yuan and H. Xie, “High-Resolution Integrated Micro Gyroscope for Space Applications,” Proceedings of the 41st Space Congress, Cape Canaveral, Florida, 2004, pp. 190-197.
A. Sadat, Y. Liu, J. Yuan, and H. Xie, "Soft Breakdown Effects on MOS Switch and Passive Mixer," Proceedings of the IEEE International Reliability Physics Symposium, Phoenix, AZ, 2004, pp. 653-654.
U. Aghoram, V. Anantharam, M. He, K. Natarajan, H. Xie, and M. Frank, “Driving Fully-Adiabatic Logic Circuits Using Custom High-Q MEMS Resonators,” Proceedings of the 2004 International Conference on Embedded Systems and Applications (ESA’04), Las Vegas, Nevada, USA, 2004, pp. 5-11.
C-Y Li, G. Li, V. Li, P-K Wai, H. Xie, and X. Yuan, “Using 2x2 switching modules to build large 2-D MEMS optical switches,” Proceedings of the IEEE 2003 Global Communications Conference (GLOBECOM 2003), San Francisco, CA, USA, 2003, pp. 2798 - 2802.
A. Kopa, A. Jain, and H. Xie, “Laser Scanning Display using a 2D Micromirror,” Optics in the South East (OISE) 2003, Orlando, FL, 2003, pp. 77.
A. Jain, S. T. Todd, G. K. Fedder, and H. Xie, “A Large-Scanning-Angle, Electrothermal SCS Micromirror for Biomedical Imaging,” Frontiers in Optics: The 87th OSA Annual Meeting, Tucson, AZ, 2003, pp. 111.
A. Jain, T. Xie, Y. Pan, G. Fedder, and H. Xie, “A 2-Axis Electrothermal SCS Micromirror for Biomedical Imaging,” Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, HI, 2003, pp. 14-15.
H. Xie, A. Jain, T. Xie, Y. Pan, G. Fedder, “A SCS Micromirror with Large Scanning Angle for Biomedical Applications,” Proceedings of the Conference on Lasers and Electro-Optics (CLEO) 2003, Baltimore, MD, 2003, pp. 858-860.
H. Xie, Z. Pan, W. Frey, G. Fedder, “Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer,” Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, 2003, pp. 292-295.
H. Xie and G.K. Fedder, "A DRIE CMOS-MEMS Gyroscope", Proceedings of the IEEE Sensors 2002 Conference, Orlando, Florida, 2002, pp. 1413 – 1418.
H. Xie, Y. Pan and G.K. Fedder, “A SCS CMOS Micromirror for Optical Coherence Tomographic Imaging,” Proceedings of the IEEE International Conference MicroElectroMechanical Systems (MEMS 2002), Las Vegas, Nevada, USA, 2002, pp. 495-499.
H. Xie, G. Fedder, Z. Pan and W. Frey, “Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002, pp. 320-323.
 T. Xie, H. Xie, G. Fedder, M. Zeidel, and Y. Pan, "Endoscopic OCT with a micromachined mirror", Proceedings of the IEEE-EMBS Conference on Microtechnologies in Medicine & Biology, Madison, Wisconsin, 2002, pp. 208-211.

 

 

Patents   (Back to top)

1) H. Xie, “Integrated monolithic tri-axial micromachined accelerometer,” US 7,258,012, issued on August 21, 2007.
2) H. Xie, “Vertical Displacement Device,” US 7,215,429, issued on May 8, 2007.
3)  H. Xie, G. Fedder, Z. Pan and W. Frey, “Method of Fabricating Microstructures and Devices Made Therefrom,” US 7,026,184, issued on April 11, 2006.
4) H. Xie, “Vertical Displacement Device,” US 6,940,630, issued on September 6, 2005.
5) M. Frank and H. Xie, “MEMS waveform generator and adiabatic logic circuits using the same,” US Patent pending, No. 11/127,926.
6) K. Gabriel, X. Zhu and H. Xie, "Multiple Membrane Structure and Method of Manufacture,” US patent pending, US 10/143,280.
7) H. Xie and S. Todd, “Microactuator Having Multiple Degrees of Freedom”, US 60/671,894, pending.
8) H. Xie and K. Ngo, “Fabrication of MEMS Device from CMOS Semiconductor”, US 60/670,355 pending.
9) H. Xie, “Single-fiber optical coherence tomography (OCT) imaging probe,” US 60/650,188, pending.
10) H. Xie, “Full circumferential scanning MEMS mirror and miniature OCT intravascular imaging probe using the same,” US 60/643,526, pending.
11) H. Xie, and K. Ngo, “Integrated Power Passives,” UF#12011, US Provisional patent filed on March 31, 2006. US 60/788,034.
12) T. Nishida, H. Xie, E. Patrick, and J. Sanchez, "Integrated CMOS-MEMS Moveable Neural Sensor/Probe,” UF#11863.
13) J. Lin, and H. Xie, “Dual Function Battery Antenna,” UF#12111.
14) H. Xie, D. Gibson, and D. Kovac, "Fiber Optic Fault Detection System for Underground Power Lines,” UF#12177.
15) D. Fang, and H. Xie, “Dual-Chopper Amplifier Readout Circuit for Capacitive Sensors,” UF#12221.
16) H. Xie and A. Ural, "Room Temperature Singled Walled Carbon Nanotube Integrated on CMOS", UF# 12546.
17) L. Wu and H. Xie, “A Self-Aligned Deep Trench Process for Light-Weight MEMS Micromirror”, UF# 12565.
18) L. Wu and H. Xie, "Electrothermal Micro Actuator for Large Vertical Lateral Shift Free Displacement", UF# 12566.
19) H. Xie, S. Maley, T. Nelson, P. McManamon, L. Wu, K. Jia and A. Pais, " Design and Fabrication Method for High-Fill-Factor Micromirrors/Micromirror Arrays", UF#12727.

 

  

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Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.

Phone : (352) 392-1049         Fax : (352) 846-1416
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