Summary of Research Projects

• Optical MEMS poster presentation, ECE, UF, 2007
• Integrated microsystems, Poster presentation, ECE, UF, 2007

Research Projects at BML

• Design, modeling and optimization of electrothermal micromirrors

• Tip-Tilt-Piston Electrothermally Actuated Micromirror

• Full circumferential scanning mirror

• Self-aligned deep-trench process for light weight MEMS mirrors

• 1D Electrothermal Micromirrors

• 2D Electrothermal Micromirrors

• Large-Vertical-Displacement Micromirrors

• 2D LVD Micromirrors

• 1D Electrostatic Micromirrors

• Large-Vertical-Displacement Microlens Scanners

• Lateral-shift-free, Large-Vertical-Displacement Microlens and Micromirrors

• Large rotation angle 1D electrothermal mirror

• Flip-Chip bonding of MEMS mirrors

• Optical Phase Array Driving Circuit

• MEMS based time domain OCT system

• Dental OCT

• 1-D Bimorph Actuated Micromirror for OCT Application

• 2D MEMS mirror based endoscopic imaging probe

• Portable MEMS-based Photonic Crystal Fiber endoscopic imaging probe

• Endoscopic Optical Coherence Tomography

• Optical Confocal Microscopy

• OCT Probe Design

• Working modes of accelerometers and gyroscopes and interface circuit design

• Accelerometers

• Gyroscopes

• Low Power, Low Noise Interface Circuits for Integrated Accelerometers and Gyroscopes

• CMOS-MEMS Fabrication Technology

• CMOS-MEMS, High-Q Resonators

• High power density MEMS inductor

• High density capacitor

• Power MOSFET

• SWCNTs Integrated on CMOS