Monolithic Integrated CMOS-MEMS DC-DC Converter

In the project of Power CMOS-MEMS DC-DC converter, we are going to integrate high‑power density inductors, transformers, capacitors and power MOSFET into a monolithic CMOS chip by using post-CMOS process. To increase the power density and reduce the loss, the coils of inductors and transformers are fabricated by electroplating metals in silicon molds, which increase the thickness of coils and reduce the resistance. The core loss is reduced by using high resistance magnetic material and core lamination.

(a) 180μm thick copper in high-aspect-ratio silicon trench

 (b) Released 180μm thick coils