Biophotonics & Microsystems Laboratory
| LVD Mirror Project | ||
 |
 |
 |
We
report a
large-vertical
displacement (LVD) microactuator that can generate large piston motion
at low driving voltage. This 0.7 mm by 0.32 mm sized device
demonstrates vertical displacements up to 0.2 mm at a low actuation
voltage of 6 V d.c. This device can also perform bidirectional
rotational scanning through the use of two electrothermal bimorph
actuators. The micromirror can rotate ± 20°,
and has negligible initial tilt angle and high scanning speeds (~2
kHz).
|
 |
|
LVD Actuator Design
- Uses two complementary,
electrothermal actuators
- Oriented in a folded design
structure
- Rotational displacements are
compensated by the actuators
\
Mirror plate remains parallel to substrate during
actuation
- Large stroke lengths provided by
the actuators due to:
® long arm length of frame
® initial tilt angle of frame
|
 |
|
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416