Large-Vertical-Displacement Microlens Scanner

We report a large-vertical displacement (LVD) microlens scanner that can perform large vertical scans at low actuation voltages. This 0.7 mm by 0.32 mm sized device demonstrates vertical displacements up to 0.28 mm at a low actuation voltage of 10 V d.c. Photoresist reflow technique was used to form a photoresist microlens on a lens holder that is integrated with an LVD microactuator.