Biophotonics &
Microsystems Laboratory
Large rotation angle 1D electrothermal mirror with integrated Platinum heater
We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124＜has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The new bimorph micromirror design uses platinum (Pt) for the heater, another unique feature is that the Pt heater is placed at the end of the bimorph beams instead of embedded along the beams, which greatly increases the operational range and robustness of bimorph actuators. The optical scanning angle under dc operation already exceeds 180＜, which implies many potential applications especially in biomedical endoscopic imaging.
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416