Inertial sensors including gyroscopes, accelerometers and other position sensing devices have a broad range of applications in space, au tom otive, consumer electronics, computer games and virtual reality. The combination of MEMS and CMOS technologies enables the miniaturization of inertial sensors with integrated electronics and multi-axis integration. By using a DRIE CMOS-MEMS process, we developed a 3-axis integrated accelerometer and a z-axis integrated gyroscope.

 

The following SEM shows a fabricated 3-axis integrated accelerometer that employs a torsional sensing mechanism for z-axis sensing and thus enables the 3-axis sensing integration. TSMC 0.35µm 4-metal CMOS process was used for the CMOS fabrication through MOSIS.