Biophotonics & Microsystems Laboratory
| 2-D Mirror Project | ||
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We
report
a 1mm2, two-axis, single-crystalline-silicon (SCS)-based
aluminum-coated scanning micromirror with large rotation angle (up to
40°),
which can be used in an endoscopic optical coherence tomography
imaging system. The micromirror is fabricated using the DRIE post-CMOS
micromachining process. A 4x4 pixel display using this 2-D micromirror
device has been demonstrated.
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Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416