Biophotonics & Microsystems Laboratory
 |
 |
 |
|
We
report a 2-D LVD Micromirror that uses two sets of
large-vertical-displacement (LVD) microactuators to enable 2-D
bi-directional scanning at low driving voltages. A fabricated
micromirror has negligible initial tilt angle, and can perform large
bi-directional 2D optical scans (over ±30°)
at less than 12 V dc. 2D scanning using this mirror has been
demonstrated by obtaining a 14°
by 50°
angular raster scan pattern, and other Lissajous patterns. This device
will be packaged in an endoscope for biomedical imaging
applications.
|
||
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416