Biophotonics & Microsystems Laboratory
1-D Mirror Project
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We report a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using the DRIE post-CMOS micromachining process. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.
Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.
Phone : (352) 392-1049 Fax : (352) 846-1416