Biophotonics & Microsystems Laboratory


The Biophotonics & Microsystems Laboratory (BML) was established by Dr. Huikai Xie in 2003. BML is associated with the Department of Electrical and Computer Engineering and is part of the Interdisciplinary Microsystems Group at the University of Florida. Our mission is to develop enabling micro/nanofabrication technology and build innovative integrated microsystems with improved performance, functionality and affordability for medical, industrial, space and consumer electronics applications. 
  • Our paper entitled "A Bi-Directional Large-Stroke Electrothermal MEMS Mirror With Minimal Thermal And Temporal Drift" is accepted as an oral presentation at IEEE MEMS 2017, only 10% of the submitted papers are accepted for oral presentation.
  • The optical coherence tomography research is highlighted on the cover page of Applied Optics, 2016.
  • “Outstanding Student Paper Award Finalist” at the IEEE MEMS 2016 conference! Congratulations to Xiaoyang Zhang and Liang Zhou!
Latest Publications
  • D. Wang, C. Duan, X. Zhang, Z. Yun, A. Pozzi, H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe," Applied Optics, vol. 55, no.25, 6930-6935 (2016). [Link]
  • W. Wang, J. Chen, A. S. Zivkovic, Q. A. A. Tanguy and H. Xie, "A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror," Journal of Microelectromechanical Systems, vol. 25, no. 2, pp. 347-355, April 2016. doi: 10.1109/JMEMS.2016.2522767 [Link]
  • X. Zhang, L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", IEEE MEMS 2016,, pp. 71 - 74, 01/2016.[Link]
  • Victor Tseng, Huikai Xie, "Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors," Journal of Microelectromechanical Systems, vol.25, no.1, pp.207-216 (2016) doi: 10.1109/JMEMS.2015.2499301 [Link]
  • Xiaoyang Zhang, Sanjeev J. Koppal, Rui Zhang, Liang Zhou, Elizabeth Butler, and Huikai Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid," Optics Express, 24, 3479-3487 (2016) [Link]
  • F. Han, W. Wang, X. Zhang, H. Xie, “A miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror,” Optics Express, vol. 24, no. 20, pp. 22650-22660 (2016). [Link]
  • C. Duan, Q. Tanguy, A. Pozzi, H. Xie, “Optical coherence tomography endoscopic probe based on a tilted MEMS mirror,” Biomedical Optics Express, vol. 7, no.9, pp. 3345-3354, 2016. [Link]
  • J. Li, V. Tseng, Z. Xiao, H. Xie, “A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC-DC Converters,” IEEE Transactions on Power Electronics, in print, 2016. [Link]
  • F. Han, W. Wang, X. Zhang, and H. Xie, "Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers", Journal of Microelectromechanical Systems, vol. 25, no. 4, pp. 750-760. [Link]
  • C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self aligned 45°-tilted 2-axis scanning micromirror for side-viewing imaging,” Journal of Microelectromechanical Systems, vol. 25, vol. 4, pp.799-811, 2016. [Link]
  • D. Torres, T. Wang, J. Zhang, X. Zhang, S. Dooley, X. Tan, H. Xie, N. Sepulveda, “A VO2-based MEMS mirror,” Journal of Microelectromechanical Systems, vol. 25, no. 4, pp. 780-787, 2016. [Link]
  • H-C. Park, X. Zhang, J. Mavadia-Shukla, W. Yuan, X. Li, and H. Xie, "SPIE ProceedingsElectro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOSOptical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, vol. 9697, San Francisco, California, United States, SPIE, pp. 96970O, 2016. [Link]
  • X. Dai, L. Xi, C. Duan, H. Yang, H. Xie, and H. Jiang, "A tri-modal miniature probe for in vivo imaging", Optical Tomography and Spectroscopy Biomedical Optics 2016, Fort Lauderdale, FloridaWashington, D.C., OSA, pp. OTu4C.6, 2016. [Link]
Research Highlights
  • Brain Imaging (Video Clip) [Link]
  • Welcome Prof. Fengtian Han from Tsinghua University to join BML as a visiting professor
  • Welcome Prof. Haoying Wang from Ocean University of China to join BML as a visiting professor
  • Welcome Liang Zhou from Stevens Institute of Technology to join BML as a PhD student
  • Welcome Kristine Gao and Brandon Kramer to join BML as high-school summer interns
  • Welcome Joseph Lampe from University of Minnesota to join BML as a summer intern
  • Congratulations to Victor Tseng! Victor earned his PhD degree in May 2015!
  • Welcome Quentin Tanguy from France to join BML as a dual-degree PhD student
  • Our brain imaging project received funding from NSF Biophotonics
  • Our brain imaging project received funding from UF DSR
  • Our microLiDAR project received funding from NSF Robotics
  • Our OCT endoscopy project received funding from France
  • Our MEMS scanning mirror project received funding from HRL
  • Dr. Xie will give a tutorial on Scanning MEMS Mirrors and Their Sensing Applications at the IEEE Sensors 2016 Conference IEEE Sensors 2016 Conference on October 31, 2016. Dr. Xie is also a co chair of Track 5: Optical Sensors.
  • Our group had 4 papers accepted at IEEE Transducers 2015, all oral presentations! Congratulations to Xiaoyang, Wei, and Victor!
  • Xiaoyang’s paper on MEMS XZ dual axis scanner accepted for an Oral Presentation at the IEEE MEMS 2016, Nov. 2015.
  • Lab affiliated company WiOptix has been selected as one of the final four startups in the first annual Cade Prize for Innovation!

Old videos:

NEW: "Tiny Endoscopes" at UF news                     


A full circumferential scanning micromirror (.wmv format)

3-D OCT scan of a finger (.mov or .avi)

Major research thrusts:

Optical MEMS

3mm×3mm Electrothermally Actuated Mirror


Large vertical displacement micromirror


2×2 micromirror array

4×4 micromirror array


Biomedical Imaging




Integrated Microsystems

MEMS Inductor



Integrated Accelerometer


Integrated CNT growth




















In News











 Student Login


Biophotonics & Microsystems Lab, 136 Larsen Hall, PO Box 116200, Gainesville, FL 32611-6200.

Phone : (352) 392-1049         Fax : (352) 846-1416

hit counter
free html hit counter
Home Remedies For Wrinkles
Count Stats Visits