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Our mission is
to develop enabling micro/nanofabrication technology and build innovative
integrated microsystems with improved performance, functionality and
affordability for medical, industrial, space and consumer electronics
applications. The current research activities include CMOS-MEMS fabrication,
integrated inertial sensors, sensor interface circuits design, high-Q
resonators, micromirrors, microlenses, electrothermomechanical modeling, and
endoscopic biomedical imaging probes for OCT, confocal imaging and multi-photon
imaging.
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