Check the syllabus here

MEMS Conferences and Journals:

IEEE MEMS 2007

Transducers 2007

Solid-State Sensors and Actuators workshop (Hilton Head 2006)

IEEE Sensors 2006

Optical MEMS 2006

Photonics West 2007

MEMS Clearinghouse

IEEE Sensors Journal

Sensors & Actuators

Journal of MEMS

Journal of Micromechanics and Microengineering (JMM) 2.