Check the syllabus here

MEMS references:

IEEE MEMS 2005

Transducers 2005

Solid-State Sensors and Actuators workshop (Hilton Head 2004)

IEEE Sensors 2004

MEMS Clearinghouse

IEEE Sensors Journal

Sensors & Actuators

Journal of MEMS

Journal of Micromechanics and Microengineering (JMM) 2.

See you on 8/23/2004!